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      What is a MEMS

      MEMS, Micro-Electro-Mechanical System, also known as microelectromechanical systems, Microsystems, micromachines, etc., refer to high-tech devices that are a few millimeters or smaller in size. High-tech devices in the size of a few millimeters or less.

      Microelectromechanical system (MEMS) is an independent intelligent system whose internal structure is generally on the scale of micron or even nanometer.

      Micro-electromechanical system (MEMS) is developed on the basis of microelectronic technology (semiconductor manufacturing technology). It integrates lithography, corrosion, thin film, LIGA, silicon micro-machining, non-silicon micro-machining and precision machining technology to make high-tech electronic and mechanical devices.

      Micro-electromechanical system (MEMS) is a micro device or system which integrates micro sensor, micro actuator, micro mechanical structure, micro power supply, micro energy, signal processing and control circuit, high performance electronic integrated device, interface and communication. MEMS is a revolutionary new technology, widely used in high-tech industry, is a key technology related to national science and technology development, economic prosperity and national defense security. [1]

      MEMS focuses on ultra-precision mechanical processing, involving microelectronics, materials, mechanics, chemistry, mechanics and many disciplines. Its subject area covers force, electricity, light, magnetism, sound, surface and other branches of physics, chemistry and mechanics on a micro scale. [2]

      Common products include MEMS accelerometers, MEMS microphones, micro-motors, micro-pumps, micro-vibrators, MEMS optical sensors, MEMS pressure sensors, MEMS gyroscopes, MEMS humidity sensors, MEMS gas sensors, and their integrated products.