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      5 inch(125mm) Polished Wafer

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      Growth CZ, MCZ, FZ
      Grade Prime, Test, Dummy, etc.
      Diameter 5 inch / 125mm
      Thickness 300~2000um 
      Finish As cut, lapped, etched,SSP,DSP, etc
      Orientation (100) (111)  etc
      Off cut Up to 4 deg
      Type/Dopant P/B, N/Phos, N/As, N/Sb, Intrinsic
      Resistivity CZ/MCZ : From 0.001 to 500 ohm-cm
        FZ : Up to 20k ohm-cm
      Thin films * PVD: Al, Cu, Au, Cr, Si, Ni, Fe, Mo. etc, Coating thicknesses up to 20,000 Å / ± 5 %
        * LPCVD/PECVD: Oxide, Nitride, SiC, etc , Coating thicknesses up to 200,000 Å / ± 3 %
        * Silicon epitaxial wafers and epitaxial services(SOS, GaN, GOI etc)
      Processes DSP, ultra thin, ultra flat, etc.

      Downsizing, back grinding, dicing , etc.

      MEMS


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