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      Gallium Arsenide/GaAs

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      Standard Dimensions and Tolerances for 150mm Diameter GaAs Wafer
      Property Dimension Tolerance Units
      Diameter 150 +/-0.5 mm
      Thickness,Center Point      
      Option A 675 +/-25 μm
      Option B 550 +/-25 μm
      Notch Orientation [010] +/-2 degrees
      Notch Depth 1 +0.25/-0.0 mm
             
      Standard Dimensions and Tolerances for 100mm Diameter GaAs Wafer
      Property Dimension Tolerance Units
      Diameter 100 +/-0.5 mm
      Thickness,Center Point 675 +/-25 μm
      Primary Flat Lenght 18 +/-2 mm
      Secondary Flat Lenght 18 +/-2 mm
      US/SEMI and E/J-Flat-Option available      
             
      Standard Dimensions and Tolerances for 200mm Diameter GaAs Wafer
      Property Dimension Tolerance Units
      Diameter 200 +/-0.5 mm
      Thickness,Center Point 625 +/-25 μm
      Notch Orientation [010] +/-2 degrees
      Notch Depth 1 +0.25/-0.0 mm
             
      Standard Dimensions and Tolerances for 3inch Diameter GaAs Wafer
      Property Dimension Tolerance Units
      Diameter 76.2 +/-0.5 mm
      Thickness,Center Point 625 +/-25 μm
      Primary Flat Lenght 22 +/-2 mm
      Secondary Flat Lenght 11 +/-2 mm
      US/SEMI and E/J-Flat-Option available

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