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      Gallium Arsenide/GaAs

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      Standard Dimensions and Tolerances for 150mm Diameter GaAs Wafer
      PropertyDimensionToleranceUnits
      Diameter150+/-0.5mm
      Thickness,Center Point     
      Option A675+/-25μm
      Option B550+/-25μm
      Notch Orientation[010]+/-2degrees
      Notch Depth1+0.25/-0.0mm
             
      Standard Dimensions and Tolerances for 100mm Diameter GaAs Wafer
      PropertyDimensionToleranceUnits
      Diameter100+/-0.5mm
      Thickness,Center Point675+/-25μm
      Primary Flat Lenght18+/-2mm
      Secondary Flat Lenght18+/-2mm
      US/SEMI and E/J-Flat-Option available     
             
      Standard Dimensions and Tolerances for 200mm Diameter GaAs Wafer
      PropertyDimensionToleranceUnits
      Diameter200+/-0.5mm
      Thickness,Center Point625+/-25μm
      Notch Orientation[010]+/-2degrees
      Notch Depth1+0.25/-0.0mm
             
      Standard Dimensions and Tolerances for 3inch Diameter GaAs Wafer
      PropertyDimensionToleranceUnits
      Diameter76.2+/-0.5mm
      Thickness,Center Point625+/-25μm
      Primary Flat Lenght22+/-2mm
      Secondary Flat Lenght11+/-2mm
      US/SEMI and E/J-Flat-Option available




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