Gallium Arsenide/GaAs


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Standard Dimensions and Tolerances for 150mm Diameter GaAs Wafer
Property Dimension Tolerance Units
Diameter 150 +/-0.5 mm
Thickness,Center Point      
Option A 675 +/-25 μm
Option B 550 +/-25 μm
Notch Orientation [010] +/-2 degrees
Notch Depth 1 +0.25/-0.0 mm
       
Standard Dimensions and Tolerances for 100mm Diameter GaAs Wafer
Property Dimension Tolerance Units
Diameter 100 +/-0.5 mm
Thickness,Center Point 675 +/-25 μm
Primary Flat Lenght 18 +/-2 mm
Secondary Flat Lenght 18 +/-2 mm
US/SEMI and E/J-Flat-Option available      
       
Standard Dimensions and Tolerances for 200mm Diameter GaAs Wafer
Property Dimension Tolerance Units
Diameter 200 +/-0.5 mm
Thickness,Center Point 625 +/-25 μm
Notch Orientation [010] +/-2 degrees
Notch Depth 1 +0.25/-0.0 mm
       
Standard Dimensions and Tolerances for 3inch Diameter GaAs Wafer
Property Dimension Tolerance Units
Diameter 76.2 +/-0.5 mm
Thickness,Center Point 625 +/-25 μm
Primary Flat Lenght 22 +/-2 mm
Secondary Flat Lenght 11 +/-2 mm
US/SEMI and E/J-Flat-Option available      

 


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