Growth |
CZ, MCZ, FZ |
Grade |
Prime, Test, Dummy, etc. |
Diameter |
8 inch / 200mm |
Thickness |
600~1500um |
Finish |
As cut, lapped, etched,SSP,DSP, etc |
Orientation |
(100) etc |
Off cut |
Up to 4 deg |
ype/Dopant |
P/B, N/Phos, N/As, N/Sb, Intrinsic |
Resistivity |
CZ/MCZ : From 0.001 to 1000 ohm-cm |
|
FZ : Up to 5000 ohm-cm |
Thin films |
*PVD: Al, Cu, Au, Cr, Si, Ni, Fe, Mo. etc, Coating thicknesses up to 20,000 Å / ± 5 % |
|
*LPCVD/PECVD: Oxide, Nitride, SiC, etc , Coating thicknesses up to 200,000 Å /± 3 % |
|
*Silicon epitaxial wafers and epitaxial services(SOS, GaN, GOI etc) |
Processes |
DSP, ultra thin, ultra flat, etc. |
|
Downsizing, back grinding, dicing , etc. |
|
MEMS |